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For microfluidic devices based on PDMS, the substrates are typically etched with oxygen plasma or exposed to plasma etchants to create an array of channels. However, the etchants can attack the plastic substrates causing the etching to cease and the channels to become unetched. To prevent the damage of the substrate, the use of PDMS microfluidic devices with plastic layers on both sides of the PDMS substrate is common, but this is not always possible. For example, the device may be made with a PMMA cover on the top and a thin layer of polyester film on the bottom (Adesanya et al., Proc. 1st US Microfluidic Conference, (Washington, D.C.: The Microfluidics Research Society, 1995), p. 44). Using the scheme presented here, a PMMA microfluidic union with an etched PDMS substrate is created to allow for strong bonding with the plastic film on the bottom. The union can be created in one step, and multiple unions can be made in a single device, allowing for the use of a single microfluidic device to be used for many experiments.
As with all research, this technique has some issues. It is a new concept and the published papers are quite short. The next step is to take this technology into the lab and have a broader array of applications, including cell biology, and quantification. For these, it may be better to use PDMS, since it can be designed with microfluidics in mind.
1. You need to start with a silicon wafer. The most common size is 14 mm x 7 mm. You can also use a glass slide which is similar in size to the wafer. However, the glass slide is much more fragile. You can also use a 12 mm x 24 mm wafer of LOR wafer.
It is advised to use a ramped laminator to ensure that there is a smooth transition between the fusing of the Parafilm® and the sealing of the chamber. The laminator should be fine enough that the chamber is not damaged by the contact with the laminator. If the chamber is damaged during the lamination, then the laminate will appear to be cracked or split. Ideally, the chamber should be sealed with two layers of Parafilm®, but the depth of the chamber should be such that the two layers of Parafilm® do not touch. If the chamber is sealed with just one layer of Parafilm®, then the opposite side of the chips will be sealed with Parafilm® instead of the chamber.
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